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J-GLOBAL ID:201702234899341600
整理番号:17A0329142
垂直相互接続を用いたMEMS WLCSP開発【Powered by NICT】
MEMS WLCSP development using vertical interconnection
著者 (6件):
Jung Boo Yang
(Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 2, Fusionopolis Way, 08-02 Innovis Tower, Singapore 138634)
,
Zhaohui Chen
(Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 2, Fusionopolis Way, 08-02 Innovis Tower, Singapore 138634)
,
Lin Bu
(Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 2, Fusionopolis Way, 08-02 Innovis Tower, Singapore 138634)
,
Zhi Ding Mian
(Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 2, Fusionopolis Way, 08-02 Innovis Tower, Singapore 138634)
,
Peng Ding Zhi
(Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 2, Fusionopolis Way, 08-02 Innovis Tower, Singapore 138634)
,
Chong Chai Tai
(Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 2, Fusionopolis Way, 08-02 Innovis Tower, Singapore 138634)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
EPTC
ページ:
455-458
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)