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J-GLOBAL ID:201702238894396496
整理番号:17A0400558
単一パルスレーザ誘起背面湿式エッチングの機構[招待]【Powered by NICT】
[INVITED] On the mechanisms of single-pulse laser-induced backside wet etching
著者 (8件):
Tsvetkov M.Yu.
(Institute of Photon Technologies of Federal Scientific Research Center ”Crystallography and Photonics” RAS, Troitsk, Moscow 142190, Russia)
,
Yusupov V.I.
(Institute of Photon Technologies of Federal Scientific Research Center ”Crystallography and Photonics” RAS, Troitsk, Moscow 142190, Russia)
,
Minaev N.V.
(Institute of Photon Technologies of Federal Scientific Research Center ”Crystallography and Photonics” RAS, Troitsk, Moscow 142190, Russia)
,
Akovantseva A.A.
(Institute of Photon Technologies of Federal Scientific Research Center ”Crystallography and Photonics” RAS, Troitsk, Moscow 142190, Russia)
,
Timashev P.S.
(Institute of Photon Technologies of Federal Scientific Research Center ”Crystallography and Photonics” RAS, Troitsk, Moscow 142190, Russia)
,
Golant K.M.
(Kotel’nikov Institute of Radioengineering and Electronics of RAS 125009, Russia)
,
Chichkov B.N.
(Laser Zentrum Hannover e.V., Hollerithallee 8, Hannover 30419, Germany)
,
Bagratashvili V.N.
(Institute of Photon Technologies of Federal Scientific Research Center ”Crystallography and Photonics” RAS, Troitsk, Moscow 142190, Russia)
資料名:
Optics & Laser Technology
(Optics & Laser Technology)
巻:
88
ページ:
17-23
発行年:
2017年
JST資料番号:
D0245B
ISSN:
0030-3992
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)