文献
J-GLOBAL ID:201702241262014142
整理番号:17A0314628
音響顕微鏡を用いたマイクロスケール周期構造の形状の特性評価【Powered by NICT】
Characterization of the geometry of microscale periodic structures using acoustic microscopy
著者 (4件):
Shaw Anurupa
(Georgia Institute of Technology, UMI Georgia Tech - CNRS 2958, George W. Woodruff School of Mechanical Engineering, Georgia Tech Lorraine, 2 Rue Marconi, 57070 Metz, France)
,
Liu Jingfei
(Georgia Institute of Technology, UMI Georgia Tech - CNRS 2958, George W. Woodruff School of Mechanical Engineering, Georgia Tech Lorraine, 2 Rue Marconi, 57070 Metz, France)
,
Yoon Suk Wang
(Sungkyunkwan University, 2066 Seoboo-ro, Jangan-ku, Suwon 16419, Republic of Korea)
,
Declercq Nico F.
(Georgia Institute of Technology, UMI Georgia Tech - CNRS 2958, George W. Woodruff School of Mechanical Engineering, Georgia Tech Lorraine, 2 Rue Marconi, 57070 Metz, France)
資料名:
Ultrasonics
(Ultrasonics)
巻:
70
ページ:
258-265
発行年:
2016年08月
JST資料番号:
C0379B
ISSN:
0041-624X
CODEN:
ULTRA3
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)