文献
J-GLOBAL ID:201702241425446000
整理番号:17A0356604
ガラス基TIN膜の構造と硬度に及ぼすアルゴン流量比の影響を研究した。【JST・京大機械翻訳】
Effects of N_2 /Ar Flow Ratio on Structure and Hardness of TiN Thin Films Deposited on Glass Substrates
著者 (6件):
Gu Baobao
(State Key Laboratory of Silicate Materials for Architecture,Wuhan University of Technology)
,
Zhao Qingnan
(State Key Laboratory of Silicate Materials for Architecture,Wuhan University of Technology)
,
Liu Xu
(State Key Laboratory of Silicate Materials for Architecture,Wuhan University of Technology)
,
Luo Leping
(State Key Laboratory of Silicate Materials for Architecture,Wuhan University of Technology)
,
Cong Fangling
(State Key Laboratory of Silicate Materials for Architecture,Wuhan University of Technology)
,
Zhao Xiujian
(State Key Laboratory of Silicate Materials for Architecture,Wuhan University of Technology)
資料名:
Guisuanyan Tongbao
(Guisuanyan Tongbao)
巻:
35
号:
12
ページ:
4076-4081
発行年:
2016年
JST資料番号:
C2439A
ISSN:
1001-1625
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
中国 (CHN)
言語:
中国語 (ZH)