文献
J-GLOBAL ID:201702241876821304
整理番号:17A0401112
側(SBS)システムによるSide陽極層のマルチヘッド動作の干渉効果【Powered by NICT】
Interference effects of multi-head operation of anode layer Side by side (SBS) system
著者 (7件):
Miyasaka Takeshi
(Department of Mechanical Engineering, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
,
Uyama Yudai
(Department of Human and Information Systems, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
,
Yoshida Mikoto
(Department of Human and Information Systems, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
,
Miyake Yoshimi
(Department of Human and Information Systems, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
,
Shimizu Daichi
(Department of Human and Information Systems, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
,
Goto Ryota
(Department of Human and Information Systems, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
,
Sakoda Masahiro
(Department of Human and Information Systems, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan)
資料名:
Vacuum
(Vacuum)
巻:
136
ページ:
184-189
発行年:
2017年
JST資料番号:
E0347A
ISSN:
0042-207X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)