文献
J-GLOBAL ID:201702242100345401
整理番号:17A0142323
大ストロークを用いた圧電駆動3自由度フレキシブルのナノポジショナの設計と評価【Powered by NICT】
Design and assessment of a piezo-actuated 3-DOF flexible nanopositioner with large stroke
著者 (8件):
Gao Jian
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Zeng Zhaohe
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Tang Hui
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Chen Xin
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Qiu Qian
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
He Sifeng
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
He Yunbo
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Yang Zhijun
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
3M-NANO
ページ:
19-24
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)