文献
J-GLOBAL ID:201702242669566062
整理番号:17A0365396
ガリウムイオン照射はスパッタ蒸着した非晶質炭素薄膜の締固めと硬化を誘発した【Powered by NICT】
Gallium ion irradiation induced compaction and hardening of sputter deposited amorphous carbon thin films
著者 (6件):
Lehnert Fritz
(Leibniz Institute for Surface Modification, Permoserstrasse 15, 04318 Leipzig, Germany)
,
Haeupl Tilmann
(Wilhelm-Ostwald-Institute, Faculty of Chemistry and Mineralogy, University of Leipzig, Linnestrasse 3, 04103 Leipzig, Germany)
,
Abel Bernd
(Leibniz Institute for Surface Modification, Permoserstrasse 15, 04318 Leipzig, Germany)
,
Abel Bernd
(Wilhelm-Ostwald-Institute, Faculty of Chemistry and Mineralogy, University of Leipzig, Linnestrasse 3, 04103 Leipzig, Germany)
,
Mayr S.G.
(Leibniz Institute for Surface Modification, Permoserstrasse 15, 04318 Leipzig, Germany)
,
Mayr S.G.
(Division of Surface Physics, Faculty of Physics and Earth Sciences, University of Leipzig, Linnestrasse 5, 04103 Leipzig, Germany)
資料名:
Materials & Design
(Materials & Design)
巻:
112
ページ:
512-518
発行年:
2016年
JST資料番号:
A0495B
ISSN:
0264-1275
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)