文献
J-GLOBAL ID:201702242724058710
整理番号:17A0449301
エピタキシャルCVDダイヤモンド膜成長速度のその場測定を発現する【Powered by NICT】
Express in situ measurement of epitaxial CVD diamond film growth kinetics
著者 (19件):
Bushuev E.V.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Yurov V.Yu.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Yurov V.Yu.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Bolshakov A.P.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Bolshakov A.P.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Ralchenko V.G.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Ralchenko V.G.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Ralchenko V.G.
(Harbin Institute of Technology, Harbin, PR China)
,
Khomich A.A.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Khomich A.A.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Antonova I.A.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Antonova I.A.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Ashkinazi E.E.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Ashkinazi E.E.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Shershulin V.A.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Shershulin V.A.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
,
Pashinin V.P.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Konov V.I.
(A.M. Prokhorov General Physics Institute of Russian Academy of Sciences, Moscow, Russia)
,
Konov V.I.
(National Research Nuclear University “MEPhI”, Moscow, Russia)
資料名:
Diamond and Related Materials
(Diamond and Related Materials)
巻:
72
ページ:
61-70
発行年:
2017年
JST資料番号:
W0498A
ISSN:
0925-9635
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)