文献
J-GLOBAL ID:201702243092972026
整理番号:17A0637777
低電圧衝撃緩和MEMS構造
Low-voltage shock-mitigated micro-electromechanical systems structure
著者 (4件):
Chen Ang
(School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, Arizona 85287, USA)
,
Nam Suhyun
(School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, Arizona 85287, USA)
,
Lai Ying-Cheng
(School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, Arizona 85287, USA)
,
Chae Junseok
(School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, Arizona 85287, USA)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
110
号:
20
ページ:
201903-201903-5
発行年:
2017年05月15日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)