文献
J-GLOBAL ID:201702244566811524
整理番号:17A0408198
異なるサイズとその除去機構を持つシリカを用いたサファイアの化学機械的研磨性能の特性化【Powered by NICT】
Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms
著者 (15件):
Zhou Yan
(State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Zhou Yan
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Zhou Yan
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Pan Guoshun
(State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Pan Guoshun
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Pan Guoshun
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Gong Hua
(State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Gong Hua
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Gong Hua
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Shi Xiaolei
(State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Shi Xiaolei
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Shi Xiaolei
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Zou Chunli
(State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Zou Chunli
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Zou Chunli
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
資料名:
Colloids and Surfaces. A. Physicochemical and Engineering Aspects
(Colloids and Surfaces. A. Physicochemical and Engineering Aspects)
巻:
513
ページ:
153-159
発行年:
2017年
JST資料番号:
A0539B
ISSN:
0927-7757
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)