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J-GLOBAL ID:201702244969042512
整理番号:17A0414094
励磁コイル変化による誘導結合放電におけるモード遷移の特性の比較【Powered by NICT】
Comparisons of the Characteristic on the Mode Transition in an Inductively Coupled Discharge by Exciting Coil Change
著者 (6件):
Zhang Xiao
(Department of Modern Physics, CAS Key Laboratory of Geospace Environment, University of Science and Technology of China, Hefei, China)
,
Cao Jin-Xiang
(Department of Modern Physics, CAS Key Laboratory of Geospace Environment, University of Science and Technology of China, Hefei, China)
,
Liu Yu
(CAS Key Laboratory of Geospace Environment, School of Earth and Space Science, University of Science and Technology of China, Hefei, China)
,
Wang Yan-Peng
(Department of Modern Physics, CAS Key Laboratory of Geospace Environment, University of Science and Technology of China, Hefei, China)
,
Yu Peng-Cheng
(Department of Modern Physics, CAS Key Laboratory of Geospace Environment, University of Science and Technology of China, Hefei, China)
,
Zhang Zhong-Kai
(Department of Modern Physics, CAS Key Laboratory of Geospace Environment, University of Science and Technology of China, Hefei, China)
資料名:
IEEE Transactions on Plasma Science
(IEEE Transactions on Plasma Science)
巻:
45
号:
3
ページ:
338-345
発行年:
2017年
JST資料番号:
D0036B
ISSN:
0093-3813
CODEN:
ITPSBD
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)