文献
J-GLOBAL ID:201702245150200201
整理番号:17A0057840
3D VLSI集積の観点からの低温度プロセスの最近の進歩【Powered by NICT】
Recent advances in low temperature process in view of 3D VLSI integration
著者 (33件):
Fenouillet-Beranger C.
(CEA, Leti, MINATEC Campus)
,
Batude P.
(CEA, Leti, MINATEC Campus)
,
Brunet L.
(CEA, Leti, MINATEC Campus)
,
Mazzocchi V.
(CEA, Leti, MINATEC Campus)
,
Lu C-M.V.
(STMicroelectronics, France)
,
Deprat F.
(CEA, Leti, MINATEC Campus)
,
Micout J.
(CEA, Leti, MINATEC Campus)
,
Samson M-P.
(STMicroelectronics, France)
,
Previtali B.
(CEA, Leti, MINATEC Campus)
,
Besombes P.
(CEA, Leti, MINATEC Campus)
,
Rambal N.
(CEA, Leti, MINATEC Campus)
,
Lapras V.
(CEA, Leti, MINATEC Campus)
,
Andrieu F.
(CEA, Leti, MINATEC Campus)
,
Billoint O.
(CEA, Leti, MINATEC Campus)
,
Brocard M.
(CEA, Leti, MINATEC Campus)
,
Thuries S.
(CEA, Leti, MINATEC Campus)
,
Cibrario G.
(CEA, Leti, MINATEC Campus)
,
Acosta-Alba P.
(CEA, Leti, MINATEC Campus)
,
Mathieu B.
(CEA, Leti, MINATEC Campus)
,
Kerdiles S.
(CEA, Leti, MINATEC Campus)
,
Nemouchi F.
(CEA, Leti, MINATEC Campus)
,
Arvet C.
(STMicroelectronics, France)
,
Besson P.
(STMicroelectronics, France)
,
Loup V.
(CEA, Leti, MINATEC Campus)
,
Gassilloud R.
(CEA, Leti, MINATEC Campus)
,
Garros X.
(CEA, Leti, MINATEC Campus)
,
Leroux C.
(CEA, Leti, MINATEC Campus)
,
Beugin V.
(CEA, Leti, MINATEC Campus)
,
Guerin C.
(CEA, Leti, MINATEC Campus)
,
Benoit D.
(STMicroelectronics, France)
,
Pasini L.
(CEA, Leti, MINATEC Campus)
,
Hartmann J-M.
(CEA, Leti, MINATEC Campus)
,
Vinet M.
(CEA, Leti, MINATEC Campus)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
S3S
ページ:
1-3
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)