文献
J-GLOBAL ID:201702245249366338
整理番号:17A0644078
β-Ga2O3垂直整流器における1.5MeV電子照射損傷
1.5 MeV electron irradiation damage in β-Ga2O3 vertical rectifiers
著者 (6件):
Yang Jiancheng
(Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611)
,
Ren Fan
(Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611)
,
Pearton Stephen J.
(Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611)
,
Yang Gwangseok
(Department of Chemical and Biological Engineering, Korea University, Seoul 136-713, South Korea)
,
Kim Jihyun
(Department of Chemical and Biological Engineering, Korea University, Seoul 136-713, South Korea)
,
Kuramata Akito
(Tamura Corporation and Novel Crystal Technology, Inc., Sayama, Saitama 350-1328, Japan)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
35
号:
3
ページ:
031208-031208-4
発行年:
2017年05月
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)