文献
J-GLOBAL ID:201702249735666090
整理番号:17A0839718
ナイフエッジ変位感知技法を使う線形ナノ位置決め段の二自由度運動測定のための新しいセンサ
A novel sensor for two-degree-of-freedom motion measurement of linear nanopositioning stage using knife edge displacement sensing technique
著者 (4件):
Zolfaghari Abolfazl
(Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA)
,
Jeon Seongkyul
(Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA)
,
Stepanick Christopher K.
(Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA)
,
Lee ChaBum
(Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA)
資料名:
Review of Scientific Instruments
(Review of Scientific Instruments)
巻:
88
号:
6
ページ:
065110-065110-6
発行年:
2017年06月
JST資料番号:
D0517A
ISSN:
0034-6748
CODEN:
RSINAK
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)