文献
J-GLOBAL ID:201702251419250669
整理番号:17A1651315
熱処理によるn-Si(100)上のフィルタ陰極真空アーク非晶質炭素膜の変調した電気特性【Powered by NICT】
Modified electrical characteristics of filtered cathodic vacuum arc amorphous carbon film on n-Si (100) by heat treatment
著者 (5件):
Pham Hung V.
(RMIT University, School of Engineering Melbourne, Australia, RMIT University, School of Science & Technology, Ho Chi Minh City, Vietnam)
,
Holland Anthony S.
(RMIT University, School of Engineering Melbourne, Australia, RMIT University, School of Science & Technology, Ho Chi Minh City, Vietnam)
,
Nguyen Huy L.
(RMIT University, School of Engineering Melbourne, Australia, RMIT University, School of Science & Technology, Ho Chi Minh City, Vietnam)
,
Partridge James G.
(RMIT University, School of Engineering, Melbourne, Australia)
,
Tran Hiep N.
(RMIT University, School of Engineering, Melbourne, Australia)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
RSM
ページ:
38-41
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)