文献
J-GLOBAL ID:201702253133550259
整理番号:17A1999842
マグネトロンスパッタリングと超臨界流体堆積法を用いて蒸着した銅薄膜の比較研究【Powered by NICT】
A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques
著者 (15件):
Giroire B.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Giroire B.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Ali Ahmad M.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Ali Ahmad M.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Aubert G.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Aubert G.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Teule-Gay L.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Teule-Gay L.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Michau D.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Michau D.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Watkins J.J.
(Department of Polymer Science and Engineering, University of Massachusetts Amherst, 120 Governors Drive, Amherst, MA 01003, United States)
,
Aymonier C.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Aymonier C.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Poulon-Quintin A.
(CNRS, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
,
Poulon-Quintin A.
(Univ. Bordeaux, ICMCB, UPR 9048, 87 Avenue Dr A. Schweitzer, F-33600 Pessac, France)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
643
ページ:
53-59
発行年:
2017年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)