文献
J-GLOBAL ID:201702253924900070
整理番号:17A1544936
BEOL層における層間剥離へのGHz SAM感度の研究【Powered by NICT】
Study of GHz-SAM sensitivity to delamination in BEOL layers
著者 (10件):
Khaled A.
(Fac. Engineering, Department Materials Science, KU Leuven, 3000 Leuven, Belgium)
,
Khaled A.
(imec, Kapeldreef 75, 3000 Leuven, Belgium)
,
Kljucar L.
(Fac. Engineering, Department Materials Science, KU Leuven, 3000 Leuven, Belgium)
,
Kljucar L.
(imec, Kapeldreef 75, 3000 Leuven, Belgium)
,
Brand S.
(Fraunhofer Institute for Microstructure of Materials and Systems IMWS, 06120 Halle, Germany)
,
Kogel M.
(Fraunhofer Institute for Microstructure of Materials and Systems IMWS, 06120 Halle, Germany)
,
Aertgeerts R.
(Physics Department, KU Leuven, 3000 Leuven, Belgium)
,
Nicasy R.
(Physics Department, KU Leuven, 3000 Leuven, Belgium)
,
De Wolf I.
(Fac. Engineering, Department Materials Science, KU Leuven, 3000 Leuven, Belgium)
,
De Wolf I.
(imec, Kapeldreef 75, 3000 Leuven, Belgium)
資料名:
Microelectronics Reliability
(Microelectronics Reliability)
巻:
76-77
ページ:
238-242
発行年:
2017年
JST資料番号:
C0530A
ISSN:
0026-2714
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)