文献
J-GLOBAL ID:201702255213816809
整理番号:17A0365915
犠牲層としての溶液処理した金属酸化物を用いた新しいリフトオフプロセスによるゾル-ゲル誘導PZT薄膜の精密パターンニング【Powered by NICT】
Fine-patterning of sol-gel derived PZT film by a novel lift-off process using solution-processed metal oxide as a sacrificial layer
著者 (6件):
Tue Phan Trong
(School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan)
,
Tue Phan Trong
(Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan)
,
Shimoda Tatsuya
(School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan)
,
Shimoda Tatsuya
(Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan)
,
Takamura Yuzuru
(School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan)
,
Takamura Yuzuru
(Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan)
資料名:
Ceramics International
(Ceramics International)
巻:
42
号:
16
ページ:
18431-18435
発行年:
2016年
JST資料番号:
H0705A
ISSN:
0272-8842
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)