文献
J-GLOBAL ID:201702257630824787
整理番号:17A0470295
硬質皮膜の硬度とスパッタリング速度の関係に焦点を当てた二次イオン質量分析による実験的研究【Powered by NICT】
Experimental study by Secondary Ion Mass Spectrometry focused on the relationship between hardness and sputtering rate in hard coatings
著者 (7件):
Onorati E.
(Fondazione Bruno Kessler, Center for Materials and Microsystems, via Sommarive 18, 38122 Trento, Italy)
,
Onorati E.
(University of Trento, Department of Industrial Engineering, via Sommarive 9, 38122 Trento, Italy)
,
Iacob E.
(Fondazione Bruno Kessler, Center for Materials and Microsystems, via Sommarive 18, 38122 Trento, Italy)
,
Bartali R.
(Fondazione Bruno Kessler, Center for Materials and Microsystems, via Sommarive 18, 38122 Trento, Italy)
,
Barozzi M.
(Fondazione Bruno Kessler, Center for Materials and Microsystems, via Sommarive 18, 38122 Trento, Italy)
,
Gennaro S.
(Duralar Technologies Japan, 147-40 Masuragahara, Omura-City, Nagasaki 856-0022, Japan)
,
Bersani M.
(Fondazione Bruno Kessler, Center for Materials and Microsystems, via Sommarive 18, 38122 Trento, Italy)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
625
ページ:
35-41
発行年:
2017年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)