文献
J-GLOBAL ID:201702258268507850
整理番号:17A0123766
変化マグネトロンスパッタリングパラメータによるZnSnO_3フィルムの構造と性質の特性【Powered by NICT】
Characteristics of the Structure and Properties of ZnSnO_3 Films by Varying the Magnetron Sputtering Parameters
著者 (6件):
Wu Fayu
(Laser Advanced Manufacturing Technology Center, School of Materials and Metallurgy, University of Science and Technology Liaoning)
,
Li Jianwei
(Laser Advanced Manufacturing Technology Center, School of Materials and Metallurgy, University of Science and Technology Liaoning)
,
Qi Yi
(SINOTRUK (Hong Kong) Limited Jinan Casting and Forging Center)
,
Ding Wutong
(School of Material Science and Engineering, Shenyang University of Technology)
,
Guo Yuanyuan
(Laser Advanced Manufacturing Technology Center, School of Materials and Metallurgy, University of Science and Technology Liaoning)
,
Zhou Yanwen
(Laser Advanced Manufacturing Technology Center, School of Materials and Metallurgy, University of Science and Technology Liaoning)
資料名:
Acta Metallurgica Sinica
(Acta Metallurgica Sinica)
巻:
29
号:
9
ページ:
827-833
発行年:
2016年
JST資料番号:
C5023A
ISSN:
1006-7191
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
中国 (CHN)
言語:
英語 (EN)