文献
J-GLOBAL ID:201702258975480237
整理番号:17A0400604
熱応力誘起光散乱法によるガラス基板の表面下の微小亀裂を検出するための新しい非接触検査技術の開発【Powered by NICT】
Development of a novel non-contact inspection technique to detect micro cracks under the surface of a glass substrate by thermal stress-induced light scattering method
著者 (3件):
Sakata Yoshitaro
(Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Saga 841-0052, Japan)
,
Terasaki Nao
(Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Saga 841-0052, Japan)
,
Nonaka Kazuhiro
(Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Saga 841-0052, Japan)
資料名:
Optics & Laser Technology
(Optics & Laser Technology)
巻:
90
ページ:
80-83
発行年:
2017年
JST資料番号:
D0245B
ISSN:
0030-3992
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)