文献
J-GLOBAL ID:201702259016419322
整理番号:17A1009843
Al合金及びCuCrZr合金上に成長させたTi-Zr-V非蒸発性ゲッター薄膜の合成
Synthesis of Ti-Zr-V Non-Evaporable Getter Thin Films Grown on Al Alloy and CuCrZr Alloy
著者 (7件):
WU Ling-Hui
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
,
CHENG Chia-Mu
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
,
SHUEH Chin
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
,
CHAN Che-Kai
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
,
CHANG Chin-Chun
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
,
PERNG Shen-Yaw
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
,
SHENG I-Ching
(National Synchrotron Radiation Res. Center, Hsinchu, TWN)
資料名:
Key Engineering Materials
(Key Engineering Materials)
巻:
730
ページ:
87-94
発行年:
2017年
JST資料番号:
D0744C
ISSN:
1013-9826
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
スイス (CHE)
言語:
英語 (EN)