文献
J-GLOBAL ID:201702261826702998
整理番号:17A1570370
MEMS透過型電子顕微鏡のための薄膜陽極の技術と特性【Powered by NICT】
Technology and properties of thin membrane-anode for MEMS transmission electron microscope
著者 (5件):
Krysztof Michal
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland)
,
Tomasz Grzebyk Piotr Szyszka
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland)
,
Laszczyk Karolina
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland)
,
Drzazga Anna Gorecka
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland)
,
Dziuban Jan
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
IVNC
ページ:
190-191
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)