文献
J-GLOBAL ID:201702262505750828
整理番号:17A0697733
Si(100)表面の初期酸化中の酸素輸送のメカニズム:ReaxFF分子動力学シミュレーション研究【Powered by NICT】
Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study
著者 (8件):
Sun Yu
(State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China)
,
Sun Yu
(Institute for Computational Mechanics and Its Applications, Northwestern Polytechnical University, Xi’an 710072, China)
,
Liu Yilun
(State Key Laboratory for Strength and Vibration of Mechanical Structures, School of Aerospace Engineering, Xi’an Jiaotong University, Xi’an 710049, China)
,
Chen Xuefeng
(State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China)
,
Zhai Zhi
(State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China)
,
Xu Fei
(Institute for Computational Mechanics and Its Applications, Northwestern Polytechnical University, Xi’an 710072, China)
,
Liu Yijun
(Institute for Computational Mechanics and Its Applications, Northwestern Polytechnical University, Xi’an 710072, China)
,
Liu Yijun
(Mechanical Engineering, University of Cincinnati, Cincinnati, OH 45221-0072, USA)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
406
ページ:
178-185
発行年:
2017年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)