文献
J-GLOBAL ID:201702264532315282
整理番号:17A0697642
光干渉法に基づく表面プロフィル測定技術のレビュー【Powered by NICT】
Review of surface profile measurement techniques based on optical interferometry
著者 (4件):
Wang Yunzhi
(Optical Science and Technology Laboratory, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, PR China)
,
Xie Fang
(Optical Science and Technology Laboratory, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, PR China)
,
Ma Sen
(Optical Science and Technology Laboratory, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, PR China)
,
Dong Lianlian
(Optical Science and Technology Laboratory, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, PR China)
資料名:
Optics and Lasers in Engineering
(Optics and Lasers in Engineering)
巻:
93
ページ:
164-170
発行年:
2017年
JST資料番号:
A0602B
ISSN:
0143-8166
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)