文献
J-GLOBAL ID:201702265552378953
整理番号:17A0446028
DCマグネトロンスパッタリング法を用いたフレキシブルガラス基板上のAZO薄膜の堆積と特性評価【Powered by NICT】
Deposition and characterization of AZO thin films on flexible glass substrates using DC magnetron sputtering technique
著者 (7件):
Xia Yanping
(School of Physics & Materials Science, Anhui University, Hefei 230601, PR China)
,
Wang Peihong
(School of Physics & Materials Science, Anhui University, Hefei 230601, PR China)
,
Shi Shiwei
(School of Physics & Materials Science, Anhui University, Hefei 230601, PR China)
,
Zhang Miao
(School of Physics & Materials Science, Anhui University, Hefei 230601, PR China)
,
He Gang
(School of Physics & Materials Science, Anhui University, Hefei 230601, PR China)
,
Lv Jianguo
(School of Electronic & Information Engineering, Hefei Normal University, Hefei 230601, PR China)
,
Sun Zhaoqi
(School of Physics & Materials Science, Anhui University, Hefei 230601, PR China)
資料名:
Ceramics International
(Ceramics International)
巻:
43
号:
5
ページ:
4536-4544
発行年:
2017年
JST資料番号:
H0705A
ISSN:
0272-8842
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)