文献
J-GLOBAL ID:201702265759887959
整理番号:17A1731247
AlN MEMSとCMOSチップの3次元不均一積分による自己修復狭帯域フィルタ【Powered by NICT】
Self-healing narrowband filters via 3D heterogeneous integration of AlN MEMS and CMOS chips
著者 (7件):
Calayir Enes
(Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA)
,
Xu Jinglin
(Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA)
,
Pileggi Larry
(Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA)
,
Fedder Gary K.
(Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA)
,
Merugu Srinivas
(Institute of Microelectronics, Agency for Science and Technology (A*STAR), Singapore)
,
Singh Navab
(Institute of Microelectronics, Agency for Science and Technology (A*STAR), Singapore)
,
Piazza Gianluca
(Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
IUS
ページ:
1
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)