文献
J-GLOBAL ID:201702267818024301
整理番号:17A1358102
シングルチップ三次元電界マイクロセンサの設計,製作と特性化【Powered by NICT】
Design, fabrication and characterization of a single-chip three-dimensional electric field microsensor
著者 (7件):
Ling Biyun
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
,
Wang Yu
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
,
Peng Chunrong
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
,
Li Bing
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
,
Chu Zhaozhi
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
,
Li Bin
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
,
Xia Shanhong
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
NEMS
ページ:
307-310
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)