文献
J-GLOBAL ID:201702267968875654
整理番号:17A0443971
電子ビーム蒸着によるガラス基板上のGaNエピタクシーのためのテンプレートとしての六方晶c配向チタン膜の特性【Powered by NICT】
Characteristics of hexagonal c-oriented titanium film as the template for GaN epitaxy on glass substrate by electron beam evaporation
著者 (10件):
Yu Jiadong
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Wang Jian
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Lu Boyang
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Han Yanjun
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Luo Yi
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Sun Changzheng
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Hao Zhibiao
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Xiong Bing
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Wang Lai
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
,
Li Hongtao
(Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, People’s Republic of China)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
624
ページ:
160-166
発行年:
2017年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)