文献
J-GLOBAL ID:201702268045316913
整理番号:17A1223651
SiO2/4H-SiC(0001)と(00-0)の界面における酸窒化および湿式酸化効果の電気的および物理的キャラクタリゼーション
Electrical and physical characterizations of the effects of oxynitridation and wet oxidation at the interface of SiO<sub>2</sub>/4H-SiC(0001) and (000<span style=text-decoration:overline>1</span>)
著者 (15件):
SHIOMI Hiromu
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
SHIOMI Hiromu
(Sumitomo Electric Ind., Ltd.)
,
KITAI Hidenori
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
KITAI Hidenori
(Sumitomo Electric Ind., Ltd.)
,
TSUJIMURA Masatoshi
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
TSUJIMURA Masatoshi
(Toyota Motor Corp.)
,
KIUCHI Yuji
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
KIUCHI Yuji
(New Japan Radio Co., Ltd.)
,
NAKATA Daisuke
(New Japan Radio Co., Ltd., Saitama, JPN)
,
ONO Shuichi
(New Japan Radio Co., Ltd., Saitama, JPN)
,
KOJIMA Kazutoshi
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
FUKUDA Kenji
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
SAKAMOTO Kuhihiro
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
,
YAMASAKI Kimiyohi
(New Japan Radio Co., Ltd., Saitama, JPN)
,
OKUMURA Hajime
(National Inst. of Advanced Industrial Sci. Technol. (AIST), Ibaraki, JPN)
資料名:
Japanese Journal of Applied Physics
(Japanese Journal of Applied Physics)
巻:
55
号:
4S
ページ:
04ER19.1-04ER19.6
発行年:
2016年04月
JST資料番号:
G0520B
ISSN:
0021-4922
CODEN:
JJAPB6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)