文献
J-GLOBAL ID:201702268457833352
整理番号:17A0362517
超高次走査型非線形誘電率顕微鏡を用いた局所深準位過渡分光法【Powered by NICT】
Local deep level transient spectroscopy using super-higher-order scanning nonlinear dielectric microscopy
著者 (6件):
Chinone N.
(Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan)
,
Kosugi R.
(National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan)
,
Tanaka Y.
(National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan)
,
Harada S.
(National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan)
,
Okumura H.
(National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan)
,
Cho Y.
(Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan)
資料名:
Microelectronics Reliability
(Microelectronics Reliability)
巻:
64
ページ:
566-569
発行年:
2016年
JST資料番号:
C0530A
ISSN:
0026-2714
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)