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J-GLOBAL ID:201702268590561957
整理番号:17A1820510
液体シリコン膜蒸着のための理想的な前駆体としての分岐ヒドロシランオリゴマ【Powered by NICT】
Branched Hydrosilane Oligomers as Ideal Precursors for Liquid-Based Silicon-Film Deposition
著者 (12件):
Haas Michael
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Christopoulos Viktor
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Radebner Judith
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Holthausen Michael
(Evonik Creavis GmbH, Paul-Baumann-Strasse 1, 45772, Marl, Germany)
,
Lainer Thomas
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Schuh Lukas
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Fitzek Harald
(Institute of Electron Microscopy and Nanoanalysis, Technische Universitaet Graz, Steyrergasse 17, 8010, Graz, Austria)
,
Kothleitner Gerald
(Institute of Electron Microscopy and Nanoanalysis, Technische Universitaet Graz, Steyrergasse 17, 8010, Graz, Austria)
,
Torvisco Ana
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Fischer Roland
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
,
Wunnicke Odo
(Evonik Creavis GmbH, Paul-Baumann-Strasse 1, 45772, Marl, Germany)
,
Stueger Harald
(Institute of Inorganic Chemistry, Technische Universitaet Graz, Stremayrgasse 9/IV, 8010, Graz, Austria)
資料名:
Angewandte Chemie
(Angewandte Chemie)
巻:
129
号:
45
ページ:
14259-14262
発行年:
2017年
JST資料番号:
A0396A
ISSN:
0044-8249
CODEN:
ANCEAD
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)