文献
J-GLOBAL ID:201702268914634835
整理番号:17A0386077
非冷却型微小ボロメータ応用のための,原子層堆積法による,ZnOとTiO2とをデジタル合金化した薄膜サーミスタ
Digitally alloyed ZnO and TiO2 thin film thermistors by atomic layer deposition for uncooled microbolometer applications
著者 (4件):
T. Tilkioglu Bilge
(Institute of Materials Science and Nanotechnology, Bilkent University, 06800 Ankara, Turkey)
,
Bolat Sami
(Department of Electrical and Electronics Engineering, National Nanotechnology Research Center, UNAM, Bilkent University, 06800 Ankara, Turkey)
,
Tanrikulu Mahmud Yusuf
(Department of Electrical and Electronics Engineering, Adana Science and Technology University, 01180 Adana, Turkey)
,
Okyay Ali Kemal
(Department of Electrical and Electronics Engineering, National Nanotechnology Research Center, UNAM, and Institute of Materials Science and Nanotechnology, Bilkent University, 06800 Ankara, Turkey)
資料名:
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
(Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films)
巻:
35
号:
2
ページ:
021513-021513-4
発行年:
2017年03月
JST資料番号:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)