文献
J-GLOBAL ID:201702269327367146
整理番号:17A1501527
ポリイミド膜上の500keVの陽子と酸素プラズマの複合影響【Powered by NICT】
Combined impact of 500keV protons and oxygen plasma on polyimide films
著者 (7件):
Novikov L.S.
(Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 119991 Moscow, Russia)
,
Novikov L.S.
(National Research University Higher School of Economics, Moscow 101000, Russia)
,
Voronina E.N.
(Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 119991 Moscow, Russia)
,
Voronina E.N.
(Faculty of Physics, Lomonosov Moscow State University, 119991 Moscow, Russia)
,
Chernik V.N.
(Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 119991 Moscow, Russia)
,
Zhilyakov L.A.
(Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 119991 Moscow, Russia)
,
Chirskaya N.P.
(Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 119991 Moscow, Russia)
資料名:
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms
(Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
巻:
410
ページ:
60-67
発行年:
2017年
JST資料番号:
H0899A
ISSN:
0168-583X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)