文献
J-GLOBAL ID:201702269983502954
整理番号:17A0329129
MEMS WLSCPのための成形プロセスの設計と最適化【Powered by NICT】
Design and optimization of molding process for MEMS WLSCP
著者 (6件):
Lin Bu
(Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634)
,
Zhi Ding Mian
(Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634)
,
Peng Ding Zhi
(Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634)
,
Kee Peter Chang Hyun
(Institute of Microelectronics, Agency for Science, Technology and Research, 117685, Singapore)
,
Chen Zhaohui
(Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634)
,
Jung Boo Yang
(Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
EPTC
ページ:
370-375
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)