文献
J-GLOBAL ID:201702270783864485
整理番号:17A0025968
高K誘電体上の非常に低い仕事関数のALD-炭化エルビウム(ErC2)金属電極
Very Low-Work-Function ALD-Erbium Carbide (ErC2) Metal Electrode on High- $K$ Dielectrics
著者 (9件):
Ahn Hyun Jun
(Electrical Engineering Department, Korea Advanced Institute of Science and Technology, Daejeon, South Korea)
,
Moon Jungmin
(Electrical Engineering Department, Korea Advanced Institute of Science and Technology, Daejeon, South Korea)
,
Koh Sungho
(Electrical Engineering Department, Korea Advanced Institute of Science and Technology, Daejeon, South Korea)
,
Seo Yujin
(Electrical Engineering Department, Korea Advanced Institute of Science and Technology, Daejeon, South Korea)
,
Kim Choong-Ki
(Electrical Engineering Department, Korea Advanced Institute of Science and Technology, Daejeon, South Korea)
,
Rho Il Cheol
(, SK Hynix Semiconductor Inc., Cheongju, South Korea)
,
Kim Choon Hwan
(, SK Hynix Semiconductor Inc., Cheongju, South Korea)
,
Hwang Wan Sik
(Department of Materials Engineering, Korea Aerospace University, Goyang, South Korea)
,
Cho Byung Jin
(Electrical Engineering Department, Korea Advanced Institute of Science and Technology, Daejeon, South Korea)
資料名:
IEEE Transactions on Electron Devices
(IEEE Transactions on Electron Devices)
巻:
63
号:
7
ページ:
2858-2863
発行年:
2016年
JST資料番号:
C0222A
ISSN:
0018-9383
CODEN:
IETDAI
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)