文献
J-GLOBAL ID:201702270794558527
整理番号:17A0404015
アニーリング温度変調光学的,電気的性質およびゾル-ゲル処理高k HfAlO_xゲート誘電体の漏れ電流輸送機構【Powered by NICT】
Annealing-temperature-modulated optical, electrical properties, and leakage current transport mechanism of sol-gel-processed high-k HfAlOx gate dielectrics
著者 (11件):
Jin P.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
He G.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Fang Z.B.
(Department of Physics, Shaoxing University, Shaoxing 312000, China)
,
Liu M.
(Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanostructure, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China)
,
Xiao D.Q.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Gao J.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Jiang S.S.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Li W.D.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Sun Z.Q.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Zhang M.
(School of physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China)
,
Zhang M.
(Co-operative Innovation Research Center for Weak Signal-Detecting Materials and Devices Integration, Anhui University, Hefei 230601, China)
資料名:
Ceramics International
(Ceramics International)
巻:
43
号:
3
ページ:
3101-3106
発行年:
2017年
JST資料番号:
H0705A
ISSN:
0272-8842
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)