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J-GLOBAL ID:201702271172635235
整理番号:17A1251940
有向自己集合(DSA)を用いたTSV形成方法論の新しい概念【Powered by NICT】
New concept of TSV formation methodology using Directed Self-Assembly (DSA)
著者 (8件):
Fukushima Takafumi
(Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University, 6-6-12 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan)
,
Murugesan Mariappan
(New Industry Creation Hatchery Center, Tohoku University)
,
Ohsaki Shin
(New Industry Creation Hatchery Center, Tohoku University)
,
Hashimoto Hiroyuki
(New Industry Creation Hatchery Center, Tohoku University)
,
Bea Jichoel
(New Industry Creation Hatchery Center, Tohoku University)
,
Lee Kang-Wook
(New Industry Creation Hatchery Center, Tohoku University)
,
Tanaka Tetsu
(Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University, 6-6-12 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan)
,
Koyanagi Mitsumasa
(New Industry Creation Hatchery Center, Tohoku University)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
3DIC
ページ:
1-4
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)