文献
J-GLOBAL ID:201702273720994834
整理番号:17A1732388
薄い弾性多層膜の物理的パラメータを測定するための効率的な非接触法【Powered by NICT】
An efficient non-contact method for measuring physical parameters of thin elastic multilayers
著者 (4件):
Su Ziwen
(State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics, China)
,
Sun Yizhe
(State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics, China)
,
Peng Hanmin
(State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics, China)
,
Wu Dawei
(State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
IUS
ページ:
1-4
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)