文献
J-GLOBAL ID:201702275503014480
整理番号:17A0644081
集束軟x線ビームによる堆積でのCoおよびMnナノ構造の作製の探求
Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition
著者 (7件):
Tu Fan
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
,
Spaeth Andreas
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
,
Drost Martin
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
,
Vollnhals Florian
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
,
Krick Calderon Sandra
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
,
Fink Rainer H.
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
,
Marbach Hubertus
(Physikalische Chemie II and ICMM, Friedrich-Alexander-Universitaet Erlangen-Nuernberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
35
号:
3
ページ:
031601-031601-7
発行年:
2017年05月
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)