文献
J-GLOBAL ID:201702275806639607
整理番号:17A1090541
生産性向上のためのNXT:1980Di液浸スキャナーへのレイアウト独立レベリング(LIL)
Layout Independent Leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity
著者 (20件):
VAN HOOF Bram
(ASML Netherlands B.V, Veldhoven, NLD)
,
HOLSCHER Arjan
(ASML Netherlands B.V, Veldhoven, NLD)
,
GOMMERS Ralf
(ASML Netherlands B.V, Veldhoven, NLD)
,
COTTAAR Jeroen
(ASML Netherlands B.V, Veldhoven, NLD)
,
RAAS Marcel
(ASML Netherlands B.V, Veldhoven, NLD)
,
KHALEK Samah
(ASML Netherlands B.V, Veldhoven, NLD)
,
VAN KEMENADE Jan
(ASML Netherlands B.V, Veldhoven, NLD)
,
VONCKEN Maarten
(ASML Netherlands B.V, Veldhoven, NLD)
,
DE GRAAF Roelof
(ASML Netherlands B.V, Veldhoven, NLD)
,
OTI Elliot
(ASML Netherlands B.V, Veldhoven, NLD)
,
WEICHSELBAUM Stefan
(ASML Netherlands B.V, Veldhoven, NLD)
,
DROSTE Richard
(ASML Netherlands B.V, Veldhoven, NLD)
,
LEE ByeongSoo
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
CHANG Chansam
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
KANG Young Seog
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
KIM Young Ha
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
KONG Jeong-Heung
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
JANG Jong Hoon
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
NAM YoungSun
(Samsung Electronics Co., Gyeonggi-Do, KOR)
,
HWANG Hyunwoo
(Samsung Electronics Co., Gyeonggi-Do, KOR)
資料名:
Proceedings of SPIE
(Proceedings of SPIE)
巻:
10147
ページ:
101471A.1-101471A.8
発行年:
2017年
JST資料番号:
D0943A
ISSN:
0277-786X
CODEN:
PSISDG
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)