文献
J-GLOBAL ID:201702276760060087
整理番号:17A0662620
新規なデジタルチューナブルRF-MEMSディスク共振器
A novel digitally tunable RF-MEMS disk resonator
著者 (16件):
LUO Wei
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
LUO Wei
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
ZHAO Hui
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
ZHAO Hui
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
YUAN Quan
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
YUAN Quan
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
PENG Bohua
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
PENG Bohua
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
ZHAO Jicong
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
ZHAO Jicong
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
CHEN Yu
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
CHEN Yu
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
YANG Jinling
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
YANG Jinling
(State Key Lab. Transducer Technol., Shanghai, CHN)
,
YANG Fuhua
(Inst. Semiconductors, Chinese Acad. Sci., Beijing, CHN)
,
YANG Fuhua
(State Key Lab. Transducer Technol., Shanghai, CHN)
資料名:
Microsystem Technologies
(Microsystem Technologies)
巻:
23
号:
5
ページ:
1269-1273
発行年:
2017年05月
JST資料番号:
W2056A
ISSN:
0946-7076
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)