文献
J-GLOBAL ID:201702278395561413
整理番号:17A0132693
流動床反応器における原子層堆積のプロセス最適化の機構モデル化研究
Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor
著者 (8件):
Duan Chen-Long
(State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Zhu Peng-Hui
(State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Deng Zhang
(State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Li Yun
(State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Shan Bin
(School of Materials Science and Engineering, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Fang Hai-Sheng
(Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Feng Guang
(Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
,
Chen Rong
(State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, School of Optical and Electronic Information, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People’s Republic of China)
資料名:
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
(Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films)
巻:
35
号:
1
ページ:
01B102-01B102-9
発行年:
2017年01月
JST資料番号:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)