文献
J-GLOBAL ID:201702278712914458
整理番号:17A0754135
摩擦試験における機械的および電気的性質に及ぼすIGZO/グラフェン+Ni/SiO-2/Siウエハ試験片におけるIGZO膜とグラフェン層の成膜パワーの影響【Powered by NICT】
Effects of deposition power of IGZO film and graphene layer in IGZO/graphene+Ni/SiO2/Si wafer specimens on the mechanical and electrical properties in tribotests
著者 (6件):
Li Tse-Chang
(Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan)
,
Nguyen Ba-Son
(Faculty of Mechatronics - Electronics, Lac Hong University, 10 Huynh Van Nghe Road, Bienhoa, Vietnam)
,
Chiang Yu-Ching
(Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan)
,
Hsiao Ching-Lin
(Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan)
,
Lin Jen-Fin
(Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan)
,
Lin Jen-Fin
(Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
315
ページ:
44-60
発行年:
2017年
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)