文献
J-GLOBAL ID:201702278752263587
整理番号:17A0470105
ナノスケールシフトレーザスポットの相変化を利用した正確なサブミクロンエッジ検出【Powered by NICT】
Accurate submicron edge detection using the phase change of a nano-scale shifting laser spot
著者 (7件):
Hai Hoang Hong
(Department of Mechatronics, School of Mechanical Engineering, Hanoi University of Science & Technology, No. 1 Dai Co Viet Road, Hanoi, Vietnam)
,
Chen Liang-Chia
(Department of Mechatronics, School of Mechanical Engineering, Hanoi University of Science & Technology, No. 1 Dai Co Viet Road, Hanoi, Vietnam)
,
Chen Liang-Chia
(Department of Mechanical Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan)
,
Nguyen Duc Trung
(Department of Mechanical Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan)
,
Lin Shyh-Tsong
(Graduate Institute of Electro-Optical Engineering, National Taipei University of Technology, 1, Sec. 3, Zhongxiao E. Rd., Taipei 10608, Taiwan)
,
Yeh Sheng Lih
(Department of Mechanical Engineering, Lunghwa University of Science and Technology,, No.300, Sec.1, Wanshou Rd., Guishan District, Taoyuan City 33306, Taiwan)
,
Yao Ying
(Department of Mechanical Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan)
資料名:
Optics & Laser Technology
(Optics & Laser Technology)
巻:
92
ページ:
109-119
発行年:
2017年
JST資料番号:
D0245B
ISSN:
0030-3992
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)