文献
J-GLOBAL ID:201702279474504708
整理番号:17A0855341
ランタンけい酸塩不動態化中間層を持つ4H-SiC MOSキャパシタの増強された界面および電気特性【Powered by NICT】
Enhanced interfacial and electrical characteristics of 4H-SiC MOS capacitor with lanthanum silicate passivation interlayer
著者 (16件):
Wang Qian
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Wang Qian
(University of Chinese Academy of Sciences, Beijing 100049, China)
,
Cheng Xinhong
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Zheng Li
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Zheng Li
(University of Chinese Academy of Sciences, Beijing 100049, China)
,
Ye Peiyi
(Department of Materials Science and Engineering, University of California, Los Angeles, CA 90095, USA)
,
Li Menglu
(Department of Materials Science and Engineering, University of California, Los Angeles, CA 90095, USA)
,
Shen Lingyan
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Shen Lingyan
(University of Chinese Academy of Sciences, Beijing 100049, China)
,
Li Jingjie
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Li Jingjie
(University of Chinese Academy of Sciences, Beijing 100049, China)
,
Zhang Dongliang
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Zhang Dongliang
(University of Chinese Academy of Sciences, Beijing 100049, China)
,
Gu Ziyue
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
,
Gu Ziyue
(University of Chinese Academy of Sciences, Beijing 100049, China)
,
Yu Yuehui
(State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system & Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
410
ページ:
326-331
発行年:
2017年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)