文献
J-GLOBAL ID:201702279780235670
整理番号:17A1093577
ジメチル(N-エトキシ-2,2-dimethylcarboxylicpropanamide)インジウムとH_2Oを用いたIn_2O_3薄膜の熱原子層堆積【Powered by NICT】
Thermal atomic layer deposition of In2O3 thin films using dimethyl(N-ethoxy-2,2-dimethylcarboxylicpropanamide)indium and H2O
著者 (12件):
Agbenyeke Raphael Edem
(Division of Advanced Materials, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-Ro, Yuseong-Gu, Daejeon 34114, Republic of Korea)
,
Agbenyeke Raphael Edem
(Department of Chemical Convergence Materials, University of Science and Technology (UST), 217, Gajeong-Ro, Yuseong-Gu, Deajeon 34113, Republic of Korea)
,
Jung Eun Ae
(Division of Advanced Materials, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-Ro, Yuseong-Gu, Daejeon 34114, Republic of Korea)
,
Jung Eun Ae
(Department of Chemistry, Sungkyunkwan University, Suwon 16419, Republic of Korea)
,
Park Bo Keun
(Division of Advanced Materials, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-Ro, Yuseong-Gu, Daejeon 34114, Republic of Korea)
,
Park Bo Keun
(Department of Chemical Convergence Materials, University of Science and Technology (UST), 217, Gajeong-Ro, Yuseong-Gu, Deajeon 34113, Republic of Korea)
,
Chung Taek-Mo
(Division of Advanced Materials, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-Ro, Yuseong-Gu, Daejeon 34114, Republic of Korea)
,
Chung Taek-Mo
(Department of Chemical Convergence Materials, University of Science and Technology (UST), 217, Gajeong-Ro, Yuseong-Gu, Deajeon 34113, Republic of Korea)
,
Kim Chang Gyoun
(Division of Advanced Materials, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-Ro, Yuseong-Gu, Daejeon 34114, Republic of Korea)
,
Kim Chang Gyoun
(Department of Chemical Convergence Materials, University of Science and Technology (UST), 217, Gajeong-Ro, Yuseong-Gu, Deajeon 34113, Republic of Korea)
,
Han Jeong Hwan
(Division of Advanced Materials, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-Ro, Yuseong-Gu, Daejeon 34114, Republic of Korea)
,
Han Jeong Hwan
(Department of Chemical Convergence Materials, University of Science and Technology (UST), 217, Gajeong-Ro, Yuseong-Gu, Deajeon 34113, Republic of Korea)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
419
ページ:
758-763
発行年:
2017年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)