文献
J-GLOBAL ID:201702279830211886
整理番号:17A0831511
電気めっきした金から成る微小試験片の引張試験【Powered by NICT】
Tensile tests of micro-specimens composed of electroplated gold
著者 (16件):
Yanagida Sari
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Yanagida Sari
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Chang Tso-Fu Mark
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Chang Tso-Fu Mark
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Chen Chun-Yi
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Chen Chun-Yi
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Nagoshi Takashi
(National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8564, Japan)
,
Yamane Daisuke
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Yamane Daisuke
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Machida Katsuyuki
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Machida Katsuyuki
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Machida Katsuyuki
(NTT Advanced Technology Corporation, Atsuigi, Kanagawa 243-0124, Japan)
,
Masu Kazuya
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Masu Kazuya
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Sone Masato
(Institute of Innovative Research, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
,
Sone Masato
(CREST, Japan Science and Technology Agency, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
資料名:
Microelectronic Engineering
(Microelectronic Engineering)
巻:
174
ページ:
6-10
発行年:
2017年
JST資料番号:
C0406B
ISSN:
0167-9317
CODEN:
MIENEF
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)