文献
J-GLOBAL ID:201702281146203347
整理番号:17A0329131
新しいたわみXYθ運動補償器:高精度ウエハレベルチップ検出に向けて【Powered by NICT】
A novel flexure-based XYθ motion compensator: Towards high-precision wafer-level chip detection
著者 (9件):
He Sifeng
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Tang Hui
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Qiu Qian
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Xiang Xiaobin
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Che Junjie
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Chen Chuangbin
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Gao Jian
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
Chen Xin
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
,
He Yunbo
(Department of Mechatronic Engineering, Guangdong University of Technology, Guangzhou, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
EPTC
ページ:
381-387
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)