文献
J-GLOBAL ID:201702281178462203
整理番号:17A0829717
化学蒸着によるグラファイト上の非晶質SiO_2中間層とダイヤモンド膜の連続蒸着【Powered by NICT】
Consecutive deposition of amorphous SiO2 interlayer and diamond film on graphite by chemical vapor deposition
著者 (5件):
Wang Xinchang
(State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)
,
Shen Xiaotian
(State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)
,
Gao Jianfei
(State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)
,
Gao Jianfei
(Shanghai Brose Electrical motors Co., Ltd, Shanghai 200240, China)
,
Sun Fanghong
(State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)
資料名:
Carbon
(Carbon)
巻:
117
ページ:
126-136
発行年:
2017年
JST資料番号:
H0270B
ISSN:
0008-6223
CODEN:
CRBNA
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)